Invention Grant
- Patent Title: Wafer level MEMS package including dual seal ring
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Application No.: US14748482Application Date: 2015-06-24
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Publication No.: US09771258B2Publication Date: 2017-09-26
- Inventor: Buu Q. Diep , Adam M. Kennedy , Thomas Allan Kocian , Mark Lamb
- Applicant: Raytheon Company
- Applicant Address: US MA Waltham
- Assignee: RAYTHEON COMPANY
- Current Assignee: RAYTHEON COMPANY
- Current Assignee Address: US MA Waltham
- Agency: Cantor Colburn LLP
- Main IPC: H01L23/498
- IPC: H01L23/498 ; B81C1/00 ; B81B7/00

Abstract:
A microelectromechanical systems (MEMS) package includes a substrate extending between a first pair of outer edges to define a length and a second pair of outer edges to define a width. A seal ring assembly is disposed on the substrate and includes at least one seal ring creating a first boundary point adjacent to at least one MEMS device and a second boundary point adjacent at least one of the outer edges. The package further includes a window lid on the seal ring assembly to define a seal gap containing the at least one MEMS device. The seal ring assembly anchors the window lid to the substrate at the second boundary point such that deflection of the window lid into the seal gap is reduced.
Public/Granted literature
- US20160376146A1 WAFER LEVEL MEMS PACKAGE INCLUDING DUAL SEAL RING Public/Granted day:2016-12-29
Information query
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