- Patent Title: Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including merged-via open configured fill cells, and the second DOE including snake open configured fill cells
-
Application No.: US15634490Application Date: 2017-06-27
-
Publication No.: US09773775B1Publication Date: 2017-09-26
- Inventor: Stephen Lam , Dennis Ciplickas , Tomasz Brozek , Jeremy Cheng , Simone Comensoli , Indranil De , Kelvin Doong , Hans Eisenmann , Timothy Fiscus , Jonathan Haigh , Christopher Hess , John Kibarian , Sherry Lee , Marci Liao , Sheng-Che Lin , Hideki Matsuhashi , Kimon Michaels , Conor O'Sullivan , Markus Rauscher , Vyacheslav Rovner , Andrzej Strojwas , Marcin Strojwas , Carl Taylor , Rakesh Vallishayee , Larg Weiland , Nobuharu Yokoyama
- Applicant: PDF Solutions, Inc.
- Applicant Address: US CA San Jose
- Assignee: PDF Solutions, Inc.
- Current Assignee: PDF Solutions, Inc.
- Current Assignee Address: US CA San Jose
- Agent David Garrod
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L27/02 ; H01L29/45 ; H01L23/522 ; H01L23/528 ; H01L29/08 ; H01L21/66 ; G06F17/50 ; H01L27/118 ; H01L21/8234 ; H01L27/088 ; G06F11/07 ; H01L29/06
Abstract:
An IC includes first and second designs of experiments (DOES), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The first DOE contains fill cells configured to enable non-contact (NC) detection of merged-via opens, and the second DOE contains fill cells configured to enable NC detection of snake opens.
Information query
IPC分类:
