Invention Grant
- Patent Title: Method for producing a semiconductor component and a semiconductor component
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Application No.: US15009736Application Date: 2016-01-28
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Publication No.: US09773945B2Publication Date: 2017-09-26
- Inventor: Matthew Meitl , Christopher Bower , Tansen Varghese
- Applicant: OSRAM Opto Semiconductors GmbH , X-Celeprint Limited
- Applicant Address: DE Regensburg IE Cork
- Assignee: OSRAM Opto Semiconductors GmbH,X-Celeprint Limited
- Current Assignee: OSRAM Opto Semiconductors GmbH,X-Celeprint Limited
- Current Assignee Address: DE Regensburg IE Cork
- Agency: Slater Matsil, LLP
- Main IPC: H01L33/38
- IPC: H01L33/38 ; H01L33/22 ; H01L33/00 ; H01L25/075 ; H01L33/32 ; H01L33/46

Abstract:
A method for producing a plurality of semiconductor components and a semiconductor component is disclosed. In some embodiment, the method includes forming a semiconductor layer sequence, structuring the semiconductor layer sequence by forming trenches thereby structuring semiconductor bodies, applying an auxiliary substrate on the semiconductor layer sequence, so that the semiconductor layer sequence is arranged between the auxiliary substrate and the substrate and removing the substrate from the semiconductor layer sequence. The method further comprises applying an anchoring layer covering the trench and vertical surfaces of the semiconductor bodies, forming a plurality of tethers by structuring the anchoring layer in regions covering the trench, locally detaching the auxiliary substrate from the semiconductor bodies, wherein the tethers remain attached to the auxiliary substrate and selectively picking up a semiconductor body by separating the tethers from the auxiliary substrate, the semiconductor body including a portion of the layer sequence.
Public/Granted literature
- US20160225953A1 Method for Producing a Semiconductor Component and a Semiconductor Component Public/Granted day:2016-08-04
Information query
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