Invention Grant
- Patent Title: Wiring structures
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Application No.: US14477535Application Date: 2014-09-04
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Publication No.: US09780031B2Publication Date: 2017-10-03
- Inventor: Fen Chen , Cathryn J. Christiansen , Roger A. Dufresne , Charles W. Griffin
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUDRIES INC.
- Current Assignee: GLOBALFOUDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon P.C.
- Agent David Cain; Andrew M. Calderon
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/522

Abstract:
Wiring structures with dummy metal features and methods of manufacture are disclosed. A structure includes a metal wiring structure, and dummy metal features in electrical and direct physical contact with the metal wiring structure in a same plane as the metal wiring structure. The dummy metal features do not change a resistance of the metal wiring structure and are remote from other structures.
Public/Granted literature
- US20160071790A1 WIRING STRUCTURES Public/Granted day:2016-03-10
Information query
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