- 专利标题: Thin film fabricating apparatus and manufacturing method of organic light emitting device using the same
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申请号: US14719066申请日: 2015-05-21
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公开(公告)号: US09780303B2公开(公告)日: 2017-10-03
- 发明人: Hamamoto Nobuo , Miyazaki Hiroshi
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Gyeonggi-Do
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Gyeonggi-Do
- 代理机构: Cantor Colburn LLP
- 优先权: KR10-2014-0134508 20141006
- 主分类号: B05B5/08
- IPC分类号: B05B5/08 ; B05B5/025 ; H01L51/00 ; B05B5/035 ; B05B5/057 ; B05C5/00 ; B05C9/00 ; B05C13/00 ; B05B13/02
摘要:
Embodiments of the invention are directed to a thin film fabricating apparatus which may be employed in mass production and may stably provide a uniform nano-order layer. An exemplary embodiment of a thin film fabricating apparatus includes: an electrode bath which contains a thin film-forming material; a plurality of needle electrodes disposed in the electrode bath; a plurality of ring electrodes disposed on the electrode bath at positions corresponding to the needle electrodes; and a substrate stand disposed opposite to the needle electrodes and the ring electrodes, where the substrate stand holds the substrate, on which a thin film is to be formed.
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