Invention Grant
- Patent Title: Deep trench capacitor with metal plate
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Application No.: US15170224Application Date: 2016-06-01
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Publication No.: US09793341B1Publication Date: 2017-10-17
- Inventor: Ali Khakifirooz , Davood Shahrjerdi , Herbert L. Ho , Kangguo Cheng
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L21/8242 ; H01L49/02

Abstract:
The present disclosure generally relates to semiconductor structures and, more particularly, to a deep trench capacitor, integrated structures and methods of manufacture. The structure includes: a conductive material formed on an underside of an insulator layer and which acts as a back plate of a deep trench capacitor; an inner conductive layer extending through the insulator layer and an overlying substrate; and a dielectric liner between the inner conductive material and the conductive material, and formed on a sidewall of an opening within the insulator layer and the overlying substrate.
Information query
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