Invention Grant
- Patent Title: Under layer film-forming composition for imprints and method of forming pattern
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Application No.: US14549068Application Date: 2014-11-20
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Publication No.: US09796803B2Publication Date: 2017-10-24
- Inventor: Hirotaka Kitagawa , Akiko Hattori , Yuichiro Enomoto
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2012-136896 20120618; JP2013-063881 20130326
- Main IPC: C08F220/32
- IPC: C08F220/32 ; G03F7/00 ; B29C59/00 ; C08F220/18 ; C08F220/28 ; H01L21/02 ; B29K33/00

Abstract:
An under layer film having excellent surface planarity is provided. In one aspect, the under layer film-forming composition for imprints includes a (meth)acrylic resin (A) containing an ethylenic unsaturated group (P) and a nonionic hydrophilic group (Q), and having a weight average molecular weight of 1,000 or larger; and a solvent (B), the resin (A) having an acid value of smaller than 1.0 mmol/g. In another aspect, the under layer film-forming composition for imprints includes a (meth)acrylic resin (A2) containing an ethylenic unsaturated group (P), and containing, as a nonionic hydrophilic group (Q), a cyclic substituent (Q2) having a carbonyl group in the cyclic structure thereof, with a weight average molecular weight of 1,000 or larger; and a solvent (B).
Public/Granted literature
- US20150079804A1 UNDER LAYER FILM-FORMING COMPOSITION FOR IMPRINTS AND METHOD OF FORMING PATTERN Public/Granted day:2015-03-19
Information query
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