- 专利标题: Microstructure, multilayer wiring board, semiconductor package and microstructure manufacturing method
-
申请号: US15219803申请日: 2016-07-26
-
公开(公告)号: US09799594B2公开(公告)日: 2017-10-24
- 发明人: Kosuke Yamashita
- 申请人: FUJIFILM Corporation
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2014-012512 20140127
- 主分类号: H01L23/498
- IPC分类号: H01L23/498 ; H05K1/11 ; H01L21/48 ; H05K3/40 ; H05K3/46 ; H05K1/02 ; H05K1/03 ; H05K3/36 ; C25D3/00 ; C23C18/00 ; H05K1/14
摘要:
The present invention is to provide a microstructure capable of improving the withstand voltage of an insulating substrate while securing fine conductive paths, a multilayer wiring board, a semiconductor package, and a microstructure manufacturing method. The microstructure of the present invention has an insulating substrate having a plurality of through holes, and conductive paths consisting of a conductive material containing metal filling the plurality of through holes, in which an average opening diameter of the plurality of through holes is 5 nm to 500 nm, an average value of the shortest distances connecting the through holes adjacent to each other is 10 nm to 300 nm, and a moisture content is 0.005% or less with respect to the total mass of the microstructure.
公开/授权文献
信息查询
IPC分类: