Invention Grant
- Patent Title: Hydrogen COGas for carbon implant
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Application No.: US12948369Application Date: 2010-11-17
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Publication No.: US09805912B2Publication Date: 2017-10-31
- Inventor: Neil K. Colvin , Tseh-Jen Hsieh
- Applicant: Neil K. Colvin , Tseh-Jen Hsieh
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J47/08 ; H01J27/02 ; H01J37/08
Abstract:
A system, apparatus and method for increasing ion source lifetime in an ion implanter are provided. Oxidation of the ion source and ion source chamber poisoning resulting from a carbon and oxygen-containing source gas is controlled by utilizing a hydrogen co-gas, which reacts with free oxygen atoms to form hydroxide and water.
Public/Granted literature
- US20120118232A1 Hydrogen COGas For Carbon Implant Public/Granted day:2012-05-17
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