Invention Grant
- Patent Title: Plasma processing method
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Application No.: US15180672Application Date: 2016-06-13
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Publication No.: US09818582B2Publication Date: 2017-11-14
- Inventor: Hiraku Murakami , Nobutaka Sasaki , Shigeru Senzaki , Takanori Banse , Hiroshi Tsujimoto , Keigo Toyoda
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2015-122218 20150617
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
Disclosed is a plasma processing method. The method includes forming a protective film on an inner wall surface of a processing container of a plasma processing apparatus; and executing a processing on a workpiece within the processing container. When forming the protective film, a protective film forming gas is supplied from an upper side of the space between the mounting table and the side wall of the processing container so that plasma is generated. When executing the processing, a workpiece processing gas is supplied from an upper side of the mounting table so that plasma is generated.
Public/Granted literature
- US20160372308A1 PLASMA PROCESSING METHOD Public/Granted day:2016-12-22
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