- 专利标题： Molded rotatable base for a porous pad
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申请号： US13915241申请日： 2013-06-11
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公开(公告)号： US09820561B2公开(公告)日： 2017-11-21
- 发明人: Christopher Wargo , Thomas LeBlanc
- 申请人： Entegris, Inc.
- 申请人地址： US MA Billerica
- 专利权人： ENTEGRIS, INC.
- 当前专利权人： ENTEGRIS, INC.
- 当前专利权人地址： US MA Billerica
- 主分类号： B08B1/00
- IPC分类号： B08B1/00 ; B29C45/17 ; C08J9/06 ; A46B13/00 ; B29C33/00 ; B29C33/44 ; B29C44/58 ; H01L21/67 ; B29L23/00 ; B29C44/42
摘要：
A rotatable base for a porous pad has openings that provide for improved flow distribution of a liquid in the base across a substrate. The rotatable base can be molded from a two piece mold and the openings can have draft angles to facilitate the molding process.
公开/授权文献
- US20140158156A1 MOLDED ROTATABLE BASE FOR A POROUS PAD 公开/授权日：2014-06-12
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