Invention Grant
- Patent Title: Plasma generation apparatus, deposition apparatus, and plasma generation method
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Application No.: US14391499Application Date: 2013-02-27
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Publication No.: US09824867B2Publication Date: 2017-11-21
- Inventor: Eiji Furuya
- Applicant: CHUGAI RO CO., LTD.
- Applicant Address: JP Osaka-Shi, Osaka
- Assignee: CHUGAI RO CO., LTD.
- Current Assignee: CHUGAI RO CO., LTD.
- Current Assignee Address: JP Osaka-Shi, Osaka
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2012-090921 20120412
- International Application: PCT/JP2013/055231 WO 20130227
- International Announcement: WO2013/153865 WO 20131017
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/32 ; H05H1/46 ; H01J37/32 ; C23C14/35

Abstract:
Provided is a plasma generation apparatus capable of generating uniform plasma over a wide range. The plasma generation apparatus includes two oppositely arranged plasma guns each injecting a discharge gas to be ionized, and having a cathode for emitting electrons, and a converging coil for forming a magnetic flux to guide the emitted electrons, and polarities of the converging coils with respect to the cathodes in the two plasma guns are opposite to each other.
Public/Granted literature
- US20150107987A1 PLASMA GENERATION APPARATUS, DEPOSITION APPARATUS, AND PLASMA GENERATION METHOD Public/Granted day:2015-04-23
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