发明授权
- 专利标题： Method of making a multi-electrode structure usable in molecular sensing devices
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申请号： US15220307申请日： 2016-07-26
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公开(公告)号： US09829456B1公开(公告)日： 2017-11-28
- 发明人: Sungho Jin , Barry L. Merriman , Tim Geiser , Chulmin Choi , Paul W. Mola
- 申请人： Roswell Biotechnologies, Inc.
- 申请人地址： US CA San Diego
- 专利权人： Roswell Biotechnologies, Inc.
- 当前专利权人： Roswell Biotechnologies, Inc.
- 当前专利权人地址： US CA San Diego
- 代理机构： Snell & Wilmer LLP
- 主分类号： C23C16/01
- IPC分类号： C23C16/01 ; G01N27/02 ; G01N27/04 ; G01N27/22
摘要：
A molecular sensor includes a substrate defining a substrate plane, and a plurality of pairs of electrode sheets above or below the substrate at an angle to the substrate plane. The molecular sensor further includes a plurality of inner dielectric sheets between each electrode sheet in each pair of electrode sheets of the plurality of pairs, and an outer dielectric sheet between each pair of electrode sheets of the plurality of pairs.
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