Invention Grant
- Patent Title: Surface measuring device and method thereof
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Application No.: US14934607Application Date: 2015-11-06
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Publication No.: US09835449B2Publication Date: 2017-12-05
- Inventor: Chia-Hung Cho , Kai-Ping Chuang , Ming-Cheng Tsai
- Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Applicant Address: TW Hsinchu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Hsinchu
- Agency: Locke Lord LLP
- Agent Tim Tingkang Xia, Esq.
- Priority: TW104127948A 20150826
- Main IPC: G01B11/30
- IPC: G01B11/30 ; G01B21/04

Abstract:
A surface measuring device includes a rotary platform, a shifting lever, a measuring module, and a control module. The rotary platform carries an object under test and rotates the object under test at a rotating speed. The shifting lever is above the rotary platform. The measuring module disposed on the shifting lever moves to measurement positions on the shifting lever and performs a surface height measurement at a sampling frequency to sampling points on a surface of the object under test when located at one measurement position. The control module selectively adjusts the rotational speed for the rotary platform or the sampling frequency for the measuring module according to the measurement position of the measuring module on the shifting lever in order to fit a distance between the sampling points on at least one part of the surface of the object under test to a sampling rule.
Public/Granted literature
- US20170059310A1 SURFACE MEASURING DEVICE AND METHOD THEREOF Public/Granted day:2017-03-02
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