Invention Grant
- Patent Title: Multi-layered target design
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Application No.: US14620992Application Date: 2015-02-12
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Publication No.: US09841370B2Publication Date: 2017-12-12
- Inventor: Nuriel Amir
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01J1/10
- IPC: G01J1/10 ; G01N21/01 ; G03F7/20 ; G01N21/95 ; G06F17/50
Abstract:
Multi-layered targets, design files and design and production methods thereof are provided. The multi-layered targets comprise process layers arranged to have parallel segmentation features at specified regions, and target layer comprising target elements which are perpendicular to the parallel segmentation features of the process layers at the specified regions.
Public/Granted literature
- US09810620B2 Multi-layered target design Public/Granted day:2017-11-07
Information query
