Invention Grant
- Patent Title: Method for manufacturing nano-structured semiconductor light-emitting element
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Application No.: US15297647Application Date: 2016-10-19
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Publication No.: US09853185B2Publication Date: 2017-12-26
- Inventor: Nam-Goo Cha , Dong-Ho Kim , Geon-Wook Yoo
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2013-0010112 20130129; KR10-2013-0147783 20131129
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L33/06 ; H01L33/08 ; H01L33/18 ; H01L33/24 ; H01L33/36 ; H01L33/44 ; H01L33/40 ; H01L33/38

Abstract:
There is provided a method for manufacturing a nanostructure semiconductor light emitting device, including: forming a mask having a plurality of openings on a base layer; growing a first conductivity-type semiconductor layer on exposed regions of the base layer such that the plurality of openings are filled, to form a plurality of nanocores; partially removing the mask such that side surfaces of the plurality of nanocores are exposed; heat-treating the plurality of nanocores after partially removing the mask; sequentially growing an active layer and a second conductivity-type semiconductor layer on surfaces of the plurality of nanocores to form a plurality of light emitting nanostructures, after the heat treatment; and planarizing upper parts of the plurality of light emitting nanostructures such that upper surfaces of the nanocores are exposed.
Public/Granted literature
- US20170040489A1 METHOD FOR MANUFACTURING NANO-STRUCTURED SEMICONDUCTOR LIGHT-EMITTING ELEMENT Public/Granted day:2017-02-09
Information query
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