Invention Grant
- Patent Title: Cleaning composition and method of manufacturing metal wiring using the same
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Application No.: US15134672Application Date: 2016-04-21
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Publication No.: US09869027B2Publication Date: 2018-01-16
- Inventor: Bong-Yeon Kim , Jin-Ho Ju , Jun-Hyuk Woo , Jung-Hwan Song , Seok-Ho Lee , Seong-Sik Jeon , Jong-Su Han
- Applicant: Samsung Display Co., Ltd. , LTCAM CO., LTD.
- Applicant Address: KR Gyeonggi-Do KR Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.,LTCAM CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.,LTCAM CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do KR Gyeonggi-Do
- Agency: Cantor Colburn LLP
- Priority: KR10-2013-0139327 20131115
- Main IPC: C09K13/04
- IPC: C09K13/04 ; C23F1/16 ; C11D11/00 ; H01L21/02 ; H05K3/26 ; C11D7/32 ; C11D7/26 ; C11D7/08 ; C11D7/06 ; C23F11/04 ; H05K3/06 ; H05K1/03 ; H05K3/38
Abstract:
A cleaning composition includes about 0.01 to about 5 wt % of a chelating agent; about 0.01 to about 0.5 wt % of an organic acid; about 0.01 to about 1.0 wt % of an inorganic acid; about 0.01 to about 5 wt % of an alkali compound; and deionized water.
Public/Granted literature
- US20160230289A1 CLEANING COMPOSITION AND METHOD OF MANUFACTURING METAL WIRING USING THE SAME Public/Granted day:2016-08-11
Information query
