Invention Grant
- Patent Title: Extreme ultraviolet light generation device
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Application No.: US15379230Application Date: 2016-12-14
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Publication No.: US09872372B2Publication Date: 2018-01-16
- Inventor: Atsushi Ueda , Shinji Nagai , Yoshifumi Ueno , Tamotsu Abe
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G21K1/14 ; G21K1/06

Abstract:
An extreme ultraviolet light generation device is to generate extreme ultraviolet light by irradiating a target with a pulse laser beam and thereby turning the target into plasma. The device may include a chamber, a magnet configured to form a magnetic field in the chamber, and an ion catcher including a collision unit disposed so that ions guided by the magnetic field collide with the collision unit.
Public/Granted literature
- US20170094767A1 EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE Public/Granted day:2017-03-30
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