Invention Grant
- Patent Title: Multi-tier memory stack structure containing non-overlapping support pillar structures and method of making thereof
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Application No.: US15335850Application Date: 2016-10-27
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Publication No.: US09881929B1Publication Date: 2018-01-30
- Inventor: Pradhyumna Ravikirthi , Jayavel Pachamuthu , Jagdish Sabde , Peter Rabkin
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Plano
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Plano
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/11519 ; H01L27/11565 ; H01L27/11524 ; H01L27/1157 ; H01L27/11556 ; H01L27/11582

Abstract:
A first tier structure including a first alternating stack of first insulating layers and first sacrificial material layers is formed over a substrate. First support openings and first memory openings, filled with first support pillar structures and sacrificial pillar structures, respectively, are formed through the first tier structure. A second tier structure including a second alternating stack of second insulating layers and second sacrificial material layers is formed thereabove. Second support openings and second memory openings are formed through the second tier structure such that the second support openings do not overlap with the first support pillar structures and the second memory openings overlie the sacrificial pillar structures. Inter-tier memory openings are formed by removal of the sacrificial pillar structures. Memory stack structures and second support pillar structures are formed in the inter-tier memory openings and the second support openings, respectively.
Public/Granted literature
- US2563642A Thread-winding machine Public/Granted day:1951-08-07
Information query
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