Invention Grant
- Patent Title: Wafer swapper
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Application No.: US14972366Application Date: 2015-12-17
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Publication No.: US09889567B2Publication Date: 2018-02-13
- Inventor: Dale R. Du Bois , Juan Carlos Rocha-Alvarez , Karthik Janakiraman , Hari K. Ponnekanti , Sanjeev Baluja , Prajeeth Wilton
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B25J11/00 ; H01L21/67

Abstract:
The present disclosure generally relates to semiconductor process equipment used to transfer semiconductor substrates between process chambers. More specifically, embodiments described herein are related to systems and methods used to transfer, or swap, semiconductor substrates between process chambers using a transport device that employs at least two blades for the concurrent transfer of substrates between processing chambers.
Public/Granted literature
- US20160314995A1 WAFER SWAPPER Public/Granted day:2016-10-27
Information query
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