Invention Grant
- Patent Title: Contact module for optimizing emitter and contact resistance
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Application No.: US14558037Application Date: 2014-12-02
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Publication No.: US09892958B2Publication Date: 2018-02-13
- Inventor: James W. Adkisson , Anthony K. Stamper
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent David Cain; Andrew M. Calderon
- Main IPC: H01L29/732
- IPC: H01L29/732 ; H01L29/66 ; H01L29/423 ; H01L29/737 ; H01L29/10 ; H01L29/08 ; H01L23/485 ; H01L21/768 ; H01L21/02 ; H01L21/8249 ; H01L27/06
Abstract:
An advanced contact module for optimizing emitter and contact resistance and methods of manufacture are disclosed. The method includes forming a first contact via to a first portion of a first device. The method further includes filling the first contact via with metal material to form a first metal contact to the first portion of the first device. The method further includes forming additional contact vias to other portions of the first device and contacts of a second device. The method further includes cleaning the additional contact vias while protecting the first metal contact of the first portion of the first device. The method further includes filling the additional contact vias with metal material to form additional metal contacts to the other portions of the first device and the second device.
Public/Granted literature
- US20160155661A1 CONTACT MODULE FOR OPTIMIZING EMITTER AND CONTACT RESISTANCE Public/Granted day:2016-06-02
Information query
IPC分类:
