Invention Grant
- Patent Title: Laser power sensor
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Application No.: US15343802Application Date: 2016-11-04
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Publication No.: US09897481B2Publication Date: 2018-02-20
- Inventor: Michinori Maeda
- Applicant: FANUC CORPORATION
- Applicant Address: JP Yamanashi
- Assignee: FANUC CORPORATION
- Current Assignee: FANUC CORPORATION
- Current Assignee Address: JP Yamanashi
- Agency: RatnerPrestia
- Priority: JP2015-223222 20151113
- Main IPC: G01J5/02
- IPC: G01J5/02 ; G01J1/42 ; G01J1/02 ; G01J1/04

Abstract:
A low-cost laser power sensor having sufficient measurement accuracy with respect to received light intensity of the power sensor. The power sensor has a sensor substrate which receives monitor light, and a filter which attenuates the intensity of the laser beam before being received by the sensor substrate. The filter is constituted from a material having a laser transmissivity equal to zero, and has a plurality of openings within an irradiation range where the monitor light is irradiated. A summation of opening areas of the openings is equal to or more than 50% of the irradiation range. A part of the laser beam, which is irradiated to the filter and passes through the openings, is directly received by the sensor substrate.
Public/Granted literature
- US20170138787A1 LASER POWER SENSOR Public/Granted day:2017-05-18
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