Multiple layer FePt structure
Abstract:
One embodiment described herein is directed to a method involving depositing a seed layer on a substrate, the seed layer comprising A1 phase FePt with a ratio of Pt of Fe greater than 1:1. A main layer is deposited on the seed layer, the main layer comprising A1 phase FePt with a ratio of Pt to Fe of approximately 1:1. A cap layer is deposited on the main layer, the cap layer comprising A1 phase FePt with a ratio of Pt to Fe of less than 1:1. The seed, main and cap layers are annealed to convert the A1 phase FePt to L10 phase FePt having a graded FePt structure of varying stoichimetry from approximately Fe50Pt50 adjacent a lower portion of the structure proximate the substrate to Fe>50Pt
Public/Granted literature
Information query
Patent Agency Ranking
0/0