Invention Grant
- Patent Title: Conveying method and substrate processing apparatus
-
Application No.: US14633792Application Date: 2015-02-27
-
Publication No.: US09899245B2Publication Date: 2018-02-20
- Inventor: Hiroshi Kikuchi , Eiki Fujii
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JP2014-042136 20140304
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/673 ; H01L21/687

Abstract:
Provided is a method of conveying a storage container from a placing table to a conveyance place using a conveying mechanism in a substrate processing apparatus. The storage container hermetically stores a substrate and includes a flange portion formed on the top thereof. The conveying mechanism includes a hand portion provided with a flange insertion portion. The substrate processing apparatus is provided with at least two placing tables arranged side by side in a first horizontal direction. The method includes moving the placing table to the conveyance place in the second horizontal direction by a predetermined distance; sliding the hand portion from a side of a placing table neighboring to the placing table in the first horizontal direction such that the flange portion is inserted into the flange inserting portion; and conveying the storage container from the placing table to the conveyance place through the hand portion.
Public/Granted literature
- US20150255319A1 CONVEYING METHOD AND SUBSTRATE PROCESSING APPARATUS Public/Granted day:2015-09-10
Information query
IPC分类: