公开(公告)号：US20150255319A1

公开(公告)日：2015-09-10

申请号：US14633792

申请日：2015-02-27

Applicant: Tokyo Electron Limited

Inventor： Hiroshi Kikuchi ,  Eiki Fujii

IPC: H01L21/677 ,  H01L21/673

CPC classification number: H01L21/67379 ,  H01L21/6773 ,  H01L21/67769 ,  H01L21/68707

Abstract: Provided is a method of conveying a storage container from a placing table to a conveyance place using a conveying mechanism in a substrate processing apparatus. The storage container hermetically stores a substrate and includes a flange portion formed on the top thereof. The conveying mechanism includes a hand portion provided with a flange insertion portion. The substrate processing apparatus is provided with at least two placing tables arranged side by side in a first horizontal direction. The method includes moving the placing table to the conveyance place in the second horizontal direction by a predetermined distance; sliding the hand portion from a side of a placing table neighboring to the placing table in the first horizontal direction such that the flange portion is inserted into the flange inserting portion; and conveying the storage container from the placing table to the conveyance place through the hand portion.

Abstract translation: 提供了一种在基板处理装置中使用输送机构将储存容器从放置台输送到输送场所的方法。 存储容器气密地存储基板，并且包括形成在其顶部上的凸缘部分。 输送机构包括设置有凸缘插入部的手部。 基板处理装置设置有沿第一水平方向并排布置的至少两个放置台。 该方法包括将放置台沿第二水平方向移动预定距离的输送位置; 在第一水平方向上将手部从放置台的相邻侧面滑动，使得凸缘部插入凸缘插入部; 并通过手部将储存容器从放置台传送到运送场所。

公开(公告)号：US09899245B2

公开(公告)日：2018-02-20

申请号：US14633792

申请日：2015-02-27

Applicant: Tokyo Electron Limited

Inventor： Hiroshi Kikuchi ,  Eiki Fujii

IPC: H01L21/677 ,  H01L21/673 ,  H01L21/687

CPC classification number: H01L21/67379 ,  H01L21/6773 ,  H01L21/67769 ,  H01L21/68707

Abstract: Provided is a method of conveying a storage container from a placing table to a conveyance place using a conveying mechanism in a substrate processing apparatus. The storage container hermetically stores a substrate and includes a flange portion formed on the top thereof. The conveying mechanism includes a hand portion provided with a flange insertion portion. The substrate processing apparatus is provided with at least two placing tables arranged side by side in a first horizontal direction. The method includes moving the placing table to the conveyance place in the second horizontal direction by a predetermined distance; sliding the hand portion from a side of a placing table neighboring to the placing table in the first horizontal direction such that the flange portion is inserted into the flange inserting portion; and conveying the storage container from the placing table to the conveyance place through the hand portion.