发明授权
- 专利标题: Semiconductor wafer and method of ball drop on thin wafer with edge support ring
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申请号: US15240568申请日: 2016-08-18
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公开(公告)号: US09905525B1公开(公告)日: 2018-02-27
- 发明人: Michael J. Seddon , Takashi Noma , Kazuhiro Saito
- 申请人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 申请人地址: US AZ Phoenix
- 专利权人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 当前专利权人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 当前专利权人地址: US AZ Phoenix
- 代理机构: Patent Law Group: Atkins and Associates, P.C.
- 代理商 Robert D. Atkins
- 主分类号: H01L23/498
- IPC分类号: H01L23/498 ; H01L21/48 ; H01L23/00 ; B23K3/06
摘要:
A semiconductor wafer has an edge support ring around a perimeter of the semiconductor wafer and conductive layer formed over a surface of the semiconductor wafer within the edge support ring. A first stencil is disposed over the edge support ring with first openings aligned with the conductive layer. The first stencil includes a horizontal portion over the edge support ring, and a step-down portion extending the first openings to the conductive layer formed over the surface of the semiconductor wafer. The horizontal portion may have a notch with the edge support ring disposed within the notch. A plurality of bumps is dispersed over the first stencil to occupy the first openings over the conductive layer. A second stencil is disposed over the edge support ring with second openings aligned with the conductive layer to deposit a flux material in the second openings over the conductive layer.
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