- Patent Title: Integrated voltage regulators with magnetically enhanced inductors
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Application No.: US13631092Application Date: 2012-09-28
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Publication No.: US09921640B2Publication Date: 2018-03-20
- Inventor: Uwe Zillmann , Andre Schaefer , Ruchir Saraswat , Telesphor Kamgaing , Paul B. Fischer , Guido Droege
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt P.C.
- Main IPC: H01L23/48
- IPC: H01L23/48 ; G06F1/32 ; H05K1/02 ; H05K1/16

Abstract:
Magnetically enhanced inductors integrated with microelectronic devices at chip-level. In embodiments, magnetically enhanced inductors include a through substrate vias (TSVs) with fill metal to carry an electrical current proximate to a magnetic layer disposed on a substrate through which the TSV passes. In certain magnetically enhanced inductor embodiments, a TSV fill metal is disposed within a magnetic material lining the TSV. In certain magnetically enhanced inductor embodiments, a magnetically enhanced inductor includes a plurality of interconnected TSVs disposed proximate to a magnetic material layer on a side of a substrate. In embodiments, voltage regulation circuitry disposed on a first side of a substrate is integrated with one or more magnetically enhanced inductors utilizing a TSV passing through the substrate. In further embodiments, integrated circuitry on a same substrate as the magnetically enhanced inductor, or on another substrate stacked thereon, completes the VR and/or is powered by the VR circuitry.
Public/Granted literature
- US20140092574A1 INTEGRATED VOLTAGE REGULATORS WITH MAGNETICALLY ENHANCED INDUCTORS Public/Granted day:2014-04-03
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