- 专利标题： Methods of forming molybdenum sputtering targets
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申请号： US15061566申请日： 2016-03-04
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公开(公告)号： US09926623B2公开(公告)日： 2018-03-27
- 发明人: Brad Lemon , Joseph Hirt , Timothy Welling , James G. Daily, III , David Meendering , Gary Rozak , Jerome O'Grady , Prabhat Kumar , Steven A. Miller , Rong-chein Richard Wu , David G. Schwartz
- 申请人： Brad Lemon , Joseph Hirt , Timothy Welling , James G. Daily, III , David Meendering , Gary Rozak , Jerome O'Grady , Prabhat Kumar , Steven A. Miller , Rong-chein Richard Wu , David G. Schwartz
- 申请人地址： US MA Newton
- 专利权人： H.C. STARCK INC.
- 当前专利权人： H.C. STARCK INC.
- 当前专利权人地址： US MA Newton
- 代理机构： Morgan, Lewis & Bockius LLP
- 主分类号： C23C14/34
- IPC分类号： C23C14/34 ; B22F3/16 ; C22C1/04 ; C22C27/04 ; C23C14/35 ; C23C14/46 ; B22F1/00 ; B22F5/00 ; C21D8/02 ; C22F1/18 ; C23C14/14 ; B22F3/24
摘要：
In various embodiments, sputtering targets are formed by introducing molybdenum powder into a sheet bar mold, pressing the powder to form a sheet bar, sintering the sheet bar to form an ingot having a density of at least 90% of a theoretical density, preheating the ingot, rolling the ingot to form a plate, and heat treating the plate.
公开/授权文献
- US20160186311A1 METHODS OF FORMING MOLYBDENUM SPUTTERING TARGETS 公开/授权日：2016-06-30
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