Invention Grant
- Patent Title: Integrated biosensor
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Application No.: US15277108Application Date: 2016-09-27
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Publication No.: US09933388B2Publication Date: 2018-04-03
- Inventor: Chun-Wen Cheng , Fei-Lung Lai , Chia-Hua Chu , Yi-Hsien Chang , Hsin-Chieh Huang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: G01N27/414
- IPC: G01N27/414 ; H01L21/48 ; H01L23/522 ; H01L23/528

Abstract:
The present disclosure relates to an integrated chip having an integrated bio-sensor with horizontal and vertical sensing surfaces. In some embodiments, the integrated chip has a sensing device disposed within a substrate, and a lower metal wire over the substrate and electrically coupled to the sensing device. First and second metal vias are arranged on the lower metal wire at locations set back from sidewalls of the lower metal wire, and first and second upper metal wires respectively cover top surfaces of the first and second metal vias. A dielectric structure surrounds the lower metal wire, the first and second metal vias, and the first and second upper metal wires. A sensing well has sensing surfaces that extend along an upper surface of the lower metal wire and along sidewalls of the first and second metal vias and the first and second upper metal wires.
Public/Granted literature
- US20170016851A1 INTEGRATED BIOSENSOR Public/Granted day:2017-01-19
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