Invention Grant
- Patent Title: Tunnel field-effect transistor
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Application No.: US14460214Application Date: 2014-08-14
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Publication No.: US09941394B2Publication Date: 2018-04-10
- Inventor: Teng-Chun Tsai , Cheng-Tung Lin , Li-Ting Wang , Chih-Tang Peng , De-Fang Chen , Hung-Ta Lin , Chien-Hsun Wang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/739 ; H01L21/8234 ; H01L29/78 ; H01L27/088 ; H01L29/66 ; H01L29/10 ; H01L29/08 ; H01L21/265 ; H01L29/51 ; B82Y10/00 ; H01L29/423 ; H01L29/775 ; H01L29/16

Abstract:
The tunnel field-effect transistor includes a drain layer, a source layer, a channel layer, a metal gate layer, and a high-k dielectric layer. The drain and source layers are of opposite conductive types. The channel layer is disposed between the drain layer and the source layer. At least one of the drain layer, the channel layer, and the source layer has a substantially constant doping concentration. The metal gate layer is disposed around the channel layer. The high-k dielectric layer is disposed between the metal gate layer and the channel layer.
Public/Granted literature
- US20150318214A1 TUNNEL FIELD-EFFECT TRANSISTOR AND METHOD FOR FABRICTAING THE SAME Public/Granted day:2015-11-05
Information query
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