Invention Grant
- Patent Title: Ionization vacuum measuring cell
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Application No.: US14773250Application Date: 2013-07-09
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Publication No.: US09945749B2Publication Date: 2018-04-17
- Inventor: Bernhard Andreaus , Rolf Enderes , Martin Wuest , Oskar Untermarzoner , Rudolf Stocker
- Applicant: INFICON GMBH
- Applicant Address: CH Bad Ragaz
- Assignee: INFICON GMBH
- Current Assignee: INFICON GMBH
- Current Assignee Address: CH Bad Ragaz
- Agency: Notaro, Michalos & Zaccaria P.C.
- Priority: CH553/13 20130306
- International Application: PCT/EP2013/064511 WO 20130709
- International Announcement: WO2014/135229 WO 20140912
- Main IPC: G01L21/34
- IPC: G01L21/34 ; H01J41/06

Abstract:
An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by a releasable plug connection (106).
Public/Granted literature
- US20160025587A1 IONIZATION VACUUM MEASURING CELL Public/Granted day:2016-01-28
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