公开(公告)号：US09945749B2

公开(公告)日：2018-04-17

申请号：US14773250

申请日：2013-07-09

Applicant: INFICON GMBH

Inventor： Bernhard Andreaus ,  Rolf Enderes ,  Martin Wuest ,  Oskar Untermarzoner ,  Rudolf Stocker

IPC: G01L21/34 ,  H01J41/06

CPC classification number: G01L21/34 ,  H01J41/06

Abstract: An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by a releasable plug connection (106).