Invention Grant
- Patent Title: Multi-gate transistor with variably sized fin
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Application No.: US15127839Application Date: 2014-06-27
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Publication No.: US09947585B2Publication Date: 2018-04-17
- Inventor: Nidhi Nidhi , Chia-Hong Jan , Roman W. Olac-Vaw , Hsu-Yu Chang , Neville L. Dias , Walid M. Hafez , Rahul Ramaswamy
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Trop, Pruner & Hu, P.C.
- International Application: PCT/US2014/044517 WO 20140627
- International Announcement: WO2015/199712 WO 20151230
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/76 ; H01L27/088 ; H01L21/283 ; H01L21/8234 ; H01L21/265 ; H01L29/08 ; H01L29/10 ; H01L29/423

Abstract:
An embodiment includes an apparatus comprising: a non-planar transistor comprising a fin, the fin including a source region having a source region width and a source region height, a channel region having a channel region width and a channel region height, a drain region having a drain width and a drain height, and a gate dielectric formed on a sidewall of the channel region; wherein the apparatus includes at least one of (a) the channel region width being wider than the source region width, and (b) the gate dielectric including a first gate dielectric thickness at a first location and a second gate dielectric thickness at a second location, the first and second locations located at an equivalent height on the sidewall and the first and second gate dielectrics thicknesses being unequal to one another. Other embodiments are described herein.
Public/Granted literature
- US20170103923A1 MULTI-GATE TRANSISTOR WITH VARIABLY SIZED FIN Public/Granted day:2017-04-13
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