Invention Grant
- Patent Title: Thin-film transistor
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Application No.: US15388720Application Date: 2016-12-22
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Publication No.: US09947795B2Publication Date: 2018-04-17
- Inventor: Hajime Watakabe , Tomoyuki Ariyoshi , Akihiro Hanada
- Applicant: Japan Display Inc.
- Applicant Address: JP Minato-ku
- Assignee: Japan Display Inc.
- Current Assignee: Japan Display Inc.
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2016-002595 20160108
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/786 ; H01L29/24 ; H01L27/12 ; G02F1/1368 ; G02F1/1362

Abstract:
According to one embodiment, a thin-film transistor includes a first insulating film, an oxide semiconductor layer provided on the first insulating film and a second insulating film provided on the oxide semiconductor layer, and at least one of the first insulating film and the second insulating film includes a first region in contact with the oxide semiconductor layer and a second region further distant from the oxide semiconductor layer than the first region, and the second region has an argon concentration higher than that of the first region.
Public/Granted literature
- US20170200829A1 THIN-FILM TRANSISTOR Public/Granted day:2017-07-13
Information query
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