- 专利标题: Electron energy loss spectrometer using direct detection sensor
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申请号: US15411194申请日: 2017-01-20
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公开(公告)号: US09966220B2公开(公告)日: 2018-05-08
- 发明人: Colin Trevor , Matthew Lent , Alexander Jozef Gubbens , Edward James , Ray Dudley Twesten , Roice Joseph , SanJay Parekh , Thomas Sha
- 申请人: Gatan, Inc.
- 申请人地址: US PA Warrendale
- 专利权人: Gatan, Inc.
- 当前专利权人: Gatan, Inc.
- 当前专利权人地址: US PA Warrendale
- 代理机构: Snyder, Clark, Lesch & Chung, LLP
- 主分类号: H01J37/05
- IPC分类号: H01J37/05 ; H01J37/244 ; H01J37/26 ; H01J47/00 ; G21K7/00 ; G01N23/00 ; H01J37/22 ; H01J37/256 ; H01J37/28
摘要:
An electron energy loss spectrometer is described having a direct detection sensor, a high speed shutter and a sensor processor wherein the sensor processor combines images from individual sensor read-outs and converts a two dimensional image from said sensor into a one dimensional spectrum and wherein the one dimensional spectrum is output to a computer and operation of the high speed shutter is integrated with timing of imaging the sensor. The shutter is controlled to allow reduction in exposure of images corresponding to the individual sensor readouts. A plurality of images are exposed by imaging less than the full possible exposure and wherein the plurality of images are combined to form a composite image. The plurality of images can be comprised of images created by exposing the sensor for different exposure times.
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