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    HYBRID ENERGY CONVERSION AND PROCESSING DETECTOR
    4.
    发明申请
    HYBRID ENERGY CONVERSION AND PROCESSING DETECTOR 有权
    混合能量转换和加工检测器

    公开(公告)号：US20150301196A1

    公开(公告)日：2015-10-22

    申请号：US14688081

    申请日：2015-04-16

    Applicant: Gatan, Inc.

    Inventor： Alexander Jozef Gubbens ,  Paul Mooney ,  Matthew Lent

    IPC: G01T1/20

    CPC classification number: G01T1/2018 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/2443 ,  H01J2237/2446 ,  H01J2237/24485

    Abstract: There is disclosed a hybrid arrangement of more than one electron energy conversion mechanism in a detector arranged physically such that the electron image can be acquired from both energy converters in such a manner that selected high-illumination parts of the image can be imaged with an indirectly coupled scintillator detector and the remainder of the image acquired with the high-sensitivity/direct electron portion of the detector without readjustments in the beam position or mechanical positioning of the detector parts.Further, a mechanism to allow dynamically switchable or simultaneous linear and counted signal processing from each pixel of the image so that high-illumination areas can be acquired linearly without the severe dose rate limitation of counting and low-illumination regions can be acquired with counting, the switchover point determined by the dose rate at which signal quality breaks even between linear and counting modes.

    Abstract translation: 公开了一种在物理上布置的多于一个电子能量转换机构的混合布置，使得能够以两种能量转换器获得电子图像，使得图像的所选择的高照度部分可以间接成像 耦合闪烁体检测器和用检测器的高灵敏度/直接电子部分获取的图像的其余部分，而不需要在光束位置进行重新调整或检测器部件的机械定位。 此外，允许从图像的每个像素进行动态切换或同时线性和计数的信号处理的机制，使得可以线性地获取高照度区域，而不用计数就能获得计数和低照明区域的严重剂量率限制， 切换点由线性和计数模式之间的信号质量破坏时的剂量率决定。

    ELECTRONIC IMAGING DETECTOR WITH THERMAL CONDUCTION LAYER
    5.
    发明申请
    ELECTRONIC IMAGING DETECTOR WITH THERMAL CONDUCTION LAYER 有权

    公开(公告)号：US20210193848A1

    公开(公告)日：2021-06-24

    申请号：US17130666

    申请日：2020-12-22

    Applicant: Gatan, Inc.

    Inventor： Paul Mooney ,  Matthew Lent ,  Julio Kovacs ,  David Joyce

    IPC: H01L31/024 ,  H01L27/146

    Abstract: A solid state active pixel image sensor for back illumination by an electron beam is described. The image sensor comprises a thermal conduction layer for heat removal. The image sensor may also comprise a thinned silicon substrate on which an epitaxial layer is formed. The substrate may also be completely removed before or after application of the thermal conduction layer. The thermal conduction layer may comprise a metal, a metal compound, silicon, diamond or graphite.

    Hybrid energy conversion and processing detector
    6.
    发明授权
    Hybrid energy conversion and processing detector 有权

    公开(公告)号：US10215865B2

    公开(公告)日：2019-02-26

    申请号：US15616453

    申请日：2017-06-07

    Applicant: Gatan, Inc.

    Inventor： Alexander Jozef Gubbens ,  Paul Mooney ,  Matthew Lent

    IPC: G01T1/20 ,  H01J37/244

    Abstract: A hybrid arrangement of more than one electron energy conversion mechanism in an electron detector is arranged such that an image can be acquired from both energy converters so that selected high-illumination parts of the electron beam can be imaged with an indirectly coupled scintillator detector and the remainder of the image acquired with the highsensitivity/direct electron portion of the detector without readjustments in the beam position or mechanical positioning of the detector parts. Further, a mechanism is described to allow dynamically switchable or simultaneous linear and counted signal processing from each pixel on the detector so that high-illumination areas can be acquired linearly without severe dose rate limitation of counting and lowillumination regions can be acquired with counting.

    Hybrid energy conversion and processing detector
    7.
    发明授权
    Hybrid energy conversion and processing detector 有权

    公开(公告)号：US09696435B2

    公开(公告)日：2017-07-04

    申请号：US14688081

    申请日：2015-04-16

    Applicant: Gatan, Inc.

    Inventor： Alexander Jozef Gubbens ,  Paul Mooney ,  Matthew Lent

    IPC: G01T1/20 ,  H01J37/244

    CPC classification number: G01T1/2018 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/2443 ,  H01J2237/2446 ,  H01J2237/24485

    Abstract: There is disclosed a hybrid arrangement of more than one electron energy conversion mechanism in a detector arranged physically such that the electron image can be acquired from both energy converters in such a manner that selected high-illumination parts of the image can be imaged with an indirectly coupled scintillator detector and the remainder of the image acquired with the high-sensitivity/direct electron portion of the detector without readjustments in the beam position or mechanical positioning of the detector parts.Further, a mechanism to allow dynamically switchable or simultaneous linear and counted signal processing from each pixel of the image so that high-illumination areas can be acquired linearly without the severe dose rate limitation of counting and low-illumination regions can be acquired with counting, the switchover point determined by the dose rate at which signal quality breaks even between linear and counting modes.

    HYBRID ENERGY CONVERSION AND PROCESSING DETECTOR
    9.
    发明申请
    HYBRID ENERGY CONVERSION AND PROCESSING DETECTOR 审中-公开

    公开(公告)号：US20170322322A1

    公开(公告)日：2017-11-09

    申请号：US15616453

    申请日：2017-06-07

    Applicant: Gatan, Inc.

    Inventor： Alexander Jozef Gubbens ,  Paul Mooney ,  Matthew Lent

    IPC: G01T1/20 ,  H01J37/244

    CPC classification number: G01T1/2018 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/2443 ,  H01J2237/2446 ,  H01J2237/24485

    Abstract: A hybrid arrangement of more than one electron energy conversion mechanism in an electron detector is arranged such that an image can be acquired from both energy converters so that selected high-illumination parts of the electron beam can be imaged with an indirectly coupled scintillator detector and the remainder of the image acquired with the high-sensitivity/direct electron portion of the detector without readjustments in the beam position or mechanical positioning of the detector parts.Further, a mechanism is described to allow dynamically switchable or simultaneous linear and counted signal processing from each pixel on the detector so that high-illumination areas can be acquired linearly without severe dose rate limitation of counting and low-illumination regions can be acquired with counting.

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