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公开(公告)号：US09966220B2
公开(公告)日：2018-05-08
申请号：US15411194
申请日：2017-01-20
申请人： Gatan, Inc.
发明人： Colin Trevor , Matthew Lent , Alexander Jozef Gubbens , Edward James , Ray Dudley Twesten , Roice Joseph , SanJay Parekh , Thomas Sha
IPC分类号： H01J37/05 , H01J37/244 , H01J37/26 , H01J47/00 , G21K7/00 , G01N23/00 , H01J37/22 , H01J37/256 , H01J37/28
CPC分类号： H01J37/05 , H01J37/222 , H01J37/244 , H01J37/256 , H01J37/26 , H01J37/28 , H01J2237/0432 , H01J2237/05 , H01J2237/057 , H01J2237/2446 , H01J2237/24485 , H01J2237/24495 , H01J2237/24585 , H01J2237/2802
摘要： An electron energy loss spectrometer is described having a direct detection sensor, a high speed shutter and a sensor processor wherein the sensor processor combines images from individual sensor read-outs and converts a two dimensional image from said sensor into a one dimensional spectrum and wherein the one dimensional spectrum is output to a computer and operation of the high speed shutter is integrated with timing of imaging the sensor. The shutter is controlled to allow reduction in exposure of images corresponding to the individual sensor readouts. A plurality of images are exposed by imaging less than the full possible exposure and wherein the plurality of images are combined to form a composite image. The plurality of images can be comprised of images created by exposing the sensor for different exposure times.
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公开(公告)号：US10784094B2
公开(公告)日：2020-09-22
申请号：US16480379
申请日：2018-02-01
申请人： Gatan, Inc.
发明人： Colin Trevor
摘要： Electron Energy Loss Spectrometer including a correction circuit for fundamental and third harmonic line noise is described. Various circuits for creating the correction signals are also described. A method of correcting for fundamental and third harmonic line noise is also described.
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公开(公告)号：US10535492B2
公开(公告)日：2020-01-14
申请号：US15960924
申请日：2018-04-24
申请人： Gatan, Inc.
发明人： Colin Trevor , Matthew Lent , Alexander Jozef Gubbens , Edward James , Ray Dudley Twesten , Roice Joseph , SanJay Parekh , Thomas Sha
IPC分类号： H01J37/05 , H01J37/22 , H01J37/244 , H01J37/26 , H01J37/256 , H01J37/28
摘要： An electron energy loss spectrometer is described having a direct detection sensor, a high speed shutter and a sensor processor wherein the sensor processor combines images from individual sensor read-outs and converts a two dimensional image from said sensor into a one dimensional spectrum and wherein the one dimensional spectrum is output to a computer and operation of the high speed shutter is integrated with timing of imaging the sensor. The shutter is controlled to allow reduction in exposure of images corresponding to the individual sensor readouts. A plurality of images are exposed by imaging less than the full possible exposure and wherein the plurality of images are combined to form a composite image. The plurality of images can be comprised of images created by exposing the sensor for different exposure times.
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公开(公告)号：US20170207059A1
公开(公告)日：2017-07-20
申请号：US15411194
申请日：2017-01-20
申请人： Gatan, Inc.
发明人： Colin Trevor , Matthew Lent , Alexander Jozef Gubbens , Edward James , Ray Dudley Twesten , Roice Joseph , SanJay Parekh , Thomas Sha
IPC分类号： H01J37/05 , H01J37/244 , H01J37/22 , H01J37/26
CPC分类号： H01J37/05 , H01J37/222 , H01J37/244 , H01J37/256 , H01J37/26 , H01J37/28 , H01J2237/0432 , H01J2237/05 , H01J2237/057 , H01J2237/2446 , H01J2237/24485 , H01J2237/24495 , H01J2237/24585 , H01J2237/2802
摘要： An electron energy loss spectrometer is described having a direct detection sensor, a high speed shutter and a sensor processor wherein the sensor processor combines images from individual sensor read-outs and converts a two dimensional image from said sensor into a one dimensional spectrum and wherein the one dimensional spectrum is output to a computer and operation of the high speed shutter is integrated with timing of imaging the sensor. The shutter is controlled to allow reduction in exposure of images corresponding to the individual sensor readouts. A plurality of images are exposed by imaging less than the full possible exposure and wherein the plurality of images are combined to form a composite image. The plurality of images can be comprised of images created by exposing the sensor for different exposure times.
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公开(公告)号：US20180240639A1
公开(公告)日：2018-08-23
申请号：US15960924
申请日：2018-04-24
申请人： Gatan, Inc.
发明人： Colin Trevor , Matthew Lent , Alexander Jozef Gubbens , Edward James , Ray Dudley Twesten , Roice Joseph , SanJay Parekh , Thomas Sha
IPC分类号： H01J37/05 , H01J37/28 , H01J37/22 , H01J37/244 , H01J37/26 , H01J37/256
摘要： An electron energy loss spectrometer is described having a direct detection sensor, a high speed shutter and a sensor processor wherein the sensor processor combines images from individual sensor read-outs and converts a two dimensional image from said sensor into a one dimensional spectrum and wherein the one dimensional spectrum is output to a computer and operation of the high speed shutter is integrated with timing of imaging the sensor. The shutter is controlled to allow reduction in exposure of images corresponding to the individual sensor readouts. A plurality of images are exposed by imaging less than the full possible exposure and wherein the plurality of images are combined to form a composite image. The plurality of images can be comprised of images created by exposing the sensor for different exposure times.
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公开(公告)号：US09966219B2
公开(公告)日：2018-05-08
申请号：US15321533
申请日：2015-06-25
申请人： Gatan, Inc.
IPC分类号： G21K1/08 , H01J37/05 , H01J37/12 , H01J37/147 , H01J37/244 , H01J37/28
CPC分类号： H01J37/05 , H01J37/12 , H01J37/147 , H01J37/244 , H01J37/28 , H01J2237/053 , H01J2237/055 , H01J2237/057 , H01J2237/12 , H01J2237/24485 , H01J2237/2802
摘要： An electron energy loss spectrometer for electron microscopy is disclosed having an electrically isolated drift tube extending through the bending magnet and through subsequent optics that focus and magnify the spectrum. An electrostatic or magnetic lens is located either before or after or both before and after the drift tube and the lens or lenses are adjusted as a function of the bending magnet drift tube voltage to maintain a constant net focal length and to avoid defocusing. An energy selecting slit is included in certain embodiments to cleanly cut off electrons dispersed outside the energy range incident on the detector, thereby eliminating artifacts caused by unwanted electrons scattering back into the spectrum.
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公开(公告)号：US20170207058A1
公开(公告)日：2017-07-20
申请号：US15321533
申请日：2015-06-25
申请人： Gatan, Inc.
IPC分类号： H01J37/05 , H01J37/28 , H01J37/244 , H01J37/12 , H01J37/147
CPC分类号： H01J37/05 , H01J37/12 , H01J37/147 , H01J37/244 , H01J37/28 , H01J2237/053 , H01J2237/055 , H01J2237/057 , H01J2237/12 , H01J2237/24485 , H01J2237/2802
摘要： An electron energy loss spectrometer for electron microscopy is disclosed having an electrically isolated drift tube extending through the bending magnet and through subsequent optics that focus and magnify the spectrum. An electrostatic or magnetic lens is located either before or after or both before and after the drift tube and the lens or lenses are adjusted as a function of the bending magnet drift tube voltage to maintain a constant net focal length and to avoid defocusing. An energy selecting slit is included in certain embodiments to cleanly cut off electrons dispersed outside the energy range incident on the detector, thereby eliminating artifacts caused by unwanted electrons scattering back into the spectrum.
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