- Patent Title: Semiconductor memory device and method for manufacturing the same
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Application No.: US15267776Application Date: 2016-09-16
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Publication No.: US09966381B2Publication Date: 2018-05-08
- Inventor: Fumitaka Arai , Tatsuya Kato , Satoshi Nagashima , Katsuyuki Sekine , Yuta Watanabe , Keisuke Kikutani , Atsushi Murakoshi
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L21/28 ; H01L21/768 ; H01L23/535 ; H01L29/788 ; H01L21/3105 ; H01L27/11556 ; H01L27/11519

Abstract:
A semiconductor memory device includes a semiconductor substrate, a first insulating film provided on the semiconductor substrate, a first conductive film provided on a first region of the first insulating film, a second conductive film provided on a second region of the first insulating film, a first stacked body provided on the first conductive film, a second stacked body provided on the second conductive film, a first semiconductor pillar, and two conductive pillars. In the first stacked body, a second insulating film and an electrode film are stacked alternately. In the second stacked body, a third insulating film and a first film are stacked alternately. The two conductive pillars extend in the first direction through the second stacked body, are separated from the second conductive film, sandwich the second conductive film, and are connected at a bottom ends of the second conductive pillars to the semiconductor substrate.
Public/Granted literature
- US20170271348A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2017-09-21
Information query
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