- 专利标题: Low particle gas enclosure systems and methods
-
申请号: US14275637申请日: 2014-05-12
-
公开(公告)号: US09969193B2公开(公告)日: 2018-05-15
- 发明人: Justin Mauck , Alexander Sou-Kang Ko , Eliyahu Vronsky , Shandon Alderson , Alexey Stepanov
- 申请人: Kateeva, Inc.
- 申请人地址: US CA Newark
- 专利权人: Kateeva, Inc.
- 当前专利权人: Kateeva, Inc.
- 当前专利权人地址: US CA Newark
- 主分类号: B05C15/00
- IPC分类号: B05C15/00 ; B41J29/02 ; H01L51/56 ; B41J29/13
摘要:
The present teachings relate to various embodiments of a gas enclosure system that can have various components comprising a particle control system that can provide a low-particle zone proximal to a substrate. Various components of a particle control system can include a gas circulation and filtration system, a low-particle-generating motion system for moving a printhead assembly relative to a substrate, a service bundle housing exhaust system, and a printhead assembly exhaust system. In addition to maintaining substantially low levels for each species of various reactive species, including various reactive atmospheric gases, such as water vapor and oxygen, for various embodiments of a gas enclosure system that have a particle control system, an on-substrate particle specification can be readily met. Accordingly, processing of various substrates in an inert, low-particle gas environment according to systems and methods of the present teachings can have substantially lower manufacturing defects.
公开/授权文献
- US10434804B2 Low particle gas enclosure systems and methods 公开/授权日:2019-10-08
信息查询