Invention Grant
- Patent Title: Enhanced performance metallic based optical mirror substrates
-
Application No.: US14679339Application Date: 2015-04-06
-
Publication No.: US09971073B2Publication Date: 2018-05-15
- Inventor: Joseph Charles Crifasi , Gary Allen Hart , Robin Merchant Walton , Leonard Gerard Wamboldt , Jue Wang
- Applicant: Corning Incorporated
- Applicant Address: US NY Corning
- Assignee: Corning Incorporated
- Current Assignee: Corning Incorporated
- Current Assignee Address: US NY Corning
- Agent Kevin L. Bray
- Main IPC: C23C14/00
- IPC: C23C14/00 ; G02B5/08 ; C23C14/35 ; C23C14/02 ; C23C14/58 ; G02B1/14 ; C23C14/16

Abstract:
A method for coating substrates is provided. The method includes diamond turning a substrate to a surface roughness of between about 60 Å and about 100 Å RMS, wherein the substrate is one of a metal and a metal alloy. The method further includes polishing the diamond turned surface of the substrate to a surface roughness of between about 10 Å and about 25 Å to form a polished substrate, heating the polished substrate, and ion bombarding the substrate with an inert gas. The method includes depositing a coating including at least one metallic layer on the ion bombarded surface of the substrate using low pressure magnetron sputtering, and polishing the coating to form a finished surface having a surface roughness of less than about 25 Å RMS using a glycol based colloidal solution.
Public/Granted literature
- US20150293275A1 ENHANCED PERFORMANCE METALLIC BASED OPTICAL MIRROR SUBSTRATES Public/Granted day:2015-10-15
Information query
IPC分类: