Invention Grant
- Patent Title: Etching method and method of fabricating a semiconductor device using the same
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Application No.: US15229930Application Date: 2016-08-05
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Publication No.: US09972696B2Publication Date: 2018-05-15
- Inventor: Hoyoung Kim , Sang Won Bae , Jae-Jik Baek , Wonsang Choi
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2015-0133114 20150921
- Main IPC: H01L21/3213
- IPC: H01L21/3213 ; H01L29/66 ; H01L21/28 ; H01L21/3205 ; C09K13/00

Abstract:
The present disclosure relates to an etchant, a method of making an etchant, an etching method and a method of fabricating a semiconductor device using the same. The etching method includes supplying an etchant on an etch-target layer to etch the etch-target layer in a wet etch manner. The etchant contains a basic compound and a sugar alcohol, and the basic compound contains ammonium hydroxide or tetraalkyl ammonium hydroxide. In the etchant, the sugar alcohol has 0.1 to 10 parts by weight for every 100 parts by weight of the basic compound.
Public/Granted literature
- US20170084719A1 ETCHING METHOD AND METHOD OF FABRICATING A SEMICONDUCTOR DEVICE USING THE SAME Public/Granted day:2017-03-23
Information query
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