Invention Grant
- Patent Title: Prober for testing devices in a repeat structure on a substrate
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Application No.: US14491606Application Date: 2014-09-19
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Publication No.: US09983232B2Publication Date: 2018-05-29
- Inventor: Frank-Michael Werner , Matthias Zieger , Sebastian Giessmann
- Applicant: Cascade Microtech, Inc.
- Applicant Address: US OR Beaverton
- Assignee: Cascade Microtech, Inc.
- Current Assignee: Cascade Microtech, Inc.
- Current Assignee Address: US OR Beaverton
- Agency: Dascenzo Intellectual Property Law, P.C.
- Priority: DE102008003754 20080110
- Main IPC: G01R1/073
- IPC: G01R1/073 ; G01R31/28 ; G01R1/04

Abstract:
A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.
Public/Granted literature
- US20150008948A1 PROBER FOR TESTING DEVICES IN A REPEAT STRUCTURE ON A SUBSTRATE Public/Granted day:2015-01-08
Information query