- 专利标题: Multi-wafer based light absorption apparatus and applications thereof
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申请号: US15626969申请日: 2017-06-19
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公开(公告)号: US09991411B2公开(公告)日: 2018-06-05
- 发明人: Szu-Lin Cheng , Han-Din Liu , Shu-Lu Chen , Yun-Chung Na , Hui-Wen Chen
- 申请人: Artilux Corporation
- 申请人地址: KY Grand Cayman
- 专利权人: Artilux Corporation
- 当前专利权人: Artilux Corporation
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Perkins Coie LLP
- 主分类号: H01L31/0232
- IPC分类号: H01L31/0232 ; H01L31/18 ; H01L31/028
摘要:
Structures and techniques introduced here enable the design and fabrication of photodetectors (PDs) and/or other electronic circuits using typical semiconductor device manufacturing technologies meanwhile reducing the adverse impacts on PDs' performance. Examples of the various structures and techniques introduced here include, but not limited to, a pre-PD homogeneous wafer bonding technique, a pre-PD heterogeneous wafer bonding technique, a post-PD wafer bonding technique, their combinations, and a number of mirror equipped PD structures. With the introduced structures and techniques, it is possible to implement PDs using typical direct growth material epitaxy technology while reducing the adverse impact of the defect layer at the material interface caused by lattice mismatch.
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