- Patent Title: Methods for transporting wafers between wafer holders and chambers
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Application No.: US13309283Application Date: 2011-12-01
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Publication No.: US09997384B2Publication Date: 2018-06-12
- Inventor: Shao-Yen Ku , Ming-Jung Chen , Tzu Yang Chung , Chi-Yun Tseng , Rui-Ping Chuang
- Applicant: Shao-Yen Ku , Ming-Jung Chen , Tzu Yang Chung , Chi-Yun Tseng , Rui-Ping Chuang
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L21/67
- IPC: H01L21/67
Abstract:
An apparatus comprises a process chamber, and a loadlock connected to the process chamber. The loadlock is configured to have a wafer holder disposed therein. The wafer holder is configured to store a plurality of wafers, and is configured to transport the plurality of wafers away from the loadlock.
Public/Granted literature
- US20130142594A1 Methods for Transporting Wafers Between Wafer Holders and Chambers Public/Granted day:2013-06-06
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