再颁专利
- 专利标题: Scanning force microscope having aligning and adjusting means
- 专利标题(中): 具有对准和调节装置的扫描力显微镜
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申请号: US325997申请日: 1994-10-19
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公开(公告)号: USRE35514E公开(公告)日: 1997-05-20
- 发明人: Thomas R. Albrecht , Moris-Musa Dovek , Michael D. Kirk , Sang-Il Park
- 申请人: Thomas R. Albrecht , Moris-Musa Dovek , Michael D. Kirk , Sang-Il Park
- 申请人地址: CA Sunnyvale
- 专利权人: Park Scientific Instruments
- 当前专利权人: Park Scientific Instruments
- 当前专利权人地址: CA Sunnyvale
- 主分类号: G01Q20/02
- IPC分类号: G01Q20/02 ; G01Q40/00 ; G01Q70/02 ; H01J37/20 ; H01J40/14
摘要:
A scanning force microscope having a sensor head and a base wherein a moveable sample holder is housed in the base and is positioned relative to a probe housed in the sensor head, such sample being monitored by an optical deflection detection system. The detection system is configured to provide direct visual observation of the probe with respect to the sample. The mirror of the detection system is mounted in a cut away portion of a sphere and defines the axis of rotation of a kinematic mount, such providing ease of fine adjustment of the detection system. The sensor head is in communication with the base by a stage kinematic mount, such providing ease of position adjustment of the sensor head with respect to the base.
公开/授权文献
- USD270414S Combined seat and backrest for a chair 公开/授权日:1983-09-06
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