- 专利标题： Temperature sensing probe, burl plate, lithographic apparatus and method
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申请号： US15711901申请日： 2017-09-21
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公开(公告)号： USRE48668E1公开(公告)日： 2021-08-03
- 发明人: Thibault Simon Mathieu Laurent , Gerardus Adrianus Antonius Maria Kusters , Johan Gertrudis Cornelis Kunnen , Sander Catharina Reinier Derks
- 申请人： ASML NETHERLANDS B.V.
- 申请人地址： NL Veldhoven
- 专利权人： ASML NETHERLANDS B.V.
- 当前专利权人： ASML NETHERLANDS B.V.
- 当前专利权人地址： NL Veldhoven
- 代理机构： Pillsbury Winthrop Shaw Pittman, LLP
- 主分类号： G03B27/52
- IPC分类号： G03B27/52 ; G01K13/00 ; G03F7/20 ; G03B27/42
摘要：
A temperature sensing probe including a temperature sensor in an elongate housing wherein the elongate housing of the probe is elongate in a first direction and the elongate housing is comprised of a material which has a thermal conductivity of at least 500 W/mK at 20° C. in at least one direction.