Invention Application
- Patent Title: PATTERN-FORMING METHODS AND RADIATION SENSITIVE MATERIALS
- Patent Title (中): 图案形成方法和辐射敏感材料
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Application No.: PCT/GB9801953Application Date: 1998-07-02
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Publication No.: WO9901795A3Publication Date: 1999-04-15
- Inventor: MCCULLOUGH CHRISTOPHER DAVID , RAY KEVIN BARRY , MONK ALAN STANLEY VICTOR , BAYES STUART , SPOWAGE MARK JOHN
- Applicant: HORSELL GRAPHIC IND LTD , MCCULLOUGH CHRISTOPHER DAVID , RAY KEVIN BARRY , MONK ALAN STANLEY VICTOR , BAYES STUART , SPOWAGE MARK JOHN
- Assignee: HORSELL GRAPHIC IND LTD,MCCULLOUGH CHRISTOPHER DAVID,RAY KEVIN BARRY,MONK ALAN STANLEY VICTOR,BAYES STUART,SPOWAGE MARK JOHN
- Current Assignee: HORSELL GRAPHIC IND LTD,MCCULLOUGH CHRISTOPHER DAVID,RAY KEVIN BARRY,MONK ALAN STANLEY VICTOR,BAYES STUART,SPOWAGE MARK JOHN
- Priority: GB9714172 1997-07-05; GB9714169 1997-07-05; GB9809346 1998-05-01
- Main IPC: G03F7/039
- IPC: G03F7/039 ; B41C1/10 ; B41M5/36 ; B41M5/46 ; C08F12/24 ; C08G8/28 ; C08L25/18 ; C08L61/14 ; G03F7/022 ; G03F7/023 ; G03F7/20 ; H05K3/00 ; G03F7/004
Abstract:
A method for producing a predetermined resist pattern on for example a lithographic printing plate, circuit board or mask, comprises the imagewise exposure of a radiation sensitive positive working coating using a suitable radiation such as direct heat radiation, UV radiation, visible radiation, infrared radiation or electron beam radiation. The method is characterised by the use of a novel polymeric material which is functionalised by groups Q to render it insoluble in a developer, but such that exposure to the radiation renders it soluble therein. The groups Q are not diazide groups as is conventional, but are groups which do not release nitrogen on exposure to the radiation, and have hydrogen bonding capability. Examples of groups Q are 2-naphthylsulphonyloxy, 2-thienylsulphonyloxy, dansyloxy, p-toluenesulphonyloxy, benzoyloxy and n-butylsulphonyloxy.
Public/Granted literature
- WO9901795A8 PATTERN-FORMING METHODS AND RADIATION SENSITIVE MATERIALS Public/Granted day:1999-05-20
Information query
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