Invention Application
- Patent Title: CONFOCAL 3D INSPECTION SYSTEM AND PROCESS
- Patent Title (中): CONFOCAL 3D检查系统和过程
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Application No.: PCT/US0222546Application Date: 2002-07-16
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Publication No.: WO03008940A9Publication Date: 2004-06-24
- Inventor: WATKINS CORY , VAUGHNN DAVID , BLAIR ALAN
- Applicant: AUGUST TECHNOLOGY CORP
- Assignee: AUGUST TECHNOLOGY CORP
- Current Assignee: AUGUST TECHNOLOGY CORP
- Priority: US30573001 2001-07-16; US30572901 2001-07-16
- Main IPC: G01N21/95
- IPC: G01N21/95 ; G01N21/956 ; G02B13/22 ; G02B21/00 ; G02B21/16 ; G03B15/00 ; H01L21/60 ; H01L21/66 ; H05K3/00 ; G01N21/00 ; G06K9/62 ; H04N7/18
Abstract:
A confocal three dimensional inspection system (120), and process for use thereof, allows for rapid inspecting of bumps and other three dimensional (3D) features on wafers (S), other semiconductor substrates (S) and other large format micro topographies. The sensor eliminates out of focus light using a confocal principal to create a narrow depth response in the micron range.
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