Invention Application
WO2004068186A3 INTERFEROMETRIC CONFOCAL MICROSCOPY INCORPORATING A PIHNOLE ARRAY BEAM-SPLITTER 审中-公开
包含PIHNOLE阵列光束分离器的干涉微晶体

INTERFEROMETRIC CONFOCAL MICROSCOPY INCORPORATING A PIHNOLE ARRAY BEAM-SPLITTER
Abstract:
A confocal interferometry system (110) for making measurements of an object (60), the system including an array of pinholes (12) to receive a source beam (24) and act as an array of beamsplitters to separate the source beam into a reference beam and measurement beam.
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