Invention Application
WO2006025737A1 METHOD AND APPARATUS FOR THE FORMATION OF NANOMETER-SCALE ELECTRODES, AND SUCH ELECTRODES
审中-公开
用于形成纳米电极和其他电极的方法和装置
- Patent Title: METHOD AND APPARATUS FOR THE FORMATION OF NANOMETER-SCALE ELECTRODES, AND SUCH ELECTRODES
- Patent Title (中): 用于形成纳米电极和其他电极的方法和装置
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Application No.: PCT/NL2005/000630Application Date: 2005-08-31
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Publication No.: WO2006025737A1Publication Date: 2006-03-09
- Inventor: ZANDBERGEN, Hendrik Willem , TICHELAAR, Frans David , ALKEMADE, Paulus Franciscus Augustinus
- Applicant: Technische Universiteit Delft , ZANDBERGEN, Hendrik Willem , TICHELAAR, Frans David , ALKEMADE, Paulus Franciscus Augustinus
- Applicant Address: Julianalaan 134, NL-2628 BL Delft NL
- Assignee: Technische Universiteit Delft,ZANDBERGEN, Hendrik Willem,TICHELAAR, Frans David,ALKEMADE, Paulus Franciscus Augustinus
- Current Assignee: Technische Universiteit Delft,ZANDBERGEN, Hendrik Willem,TICHELAAR, Frans David,ALKEMADE, Paulus Franciscus Augustinus
- Current Assignee Address: Julianalaan 134, NL-2628 BL Delft NL
- Agency: WINCKELS, J.H.F.
- Priority: NL1026942 20040901
- Main IPC: H01J37/31
- IPC: H01J37/31 ; B81B1/00 ; B23K15/08
Abstract:
A method for the formation of nanometer-scale electrodes, wherein strip of electrically conductive material, in particular metal, is provided with a longitudinal direction, a width direction and a thickness direction and then, with the aid of an electron beam, a groove is provided in a top surface of the strip, in the width direction of the strip, with a nanometer- scale width in the longitudinal direction of the strip.
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